Data processing: measuring – calibrating – or testing – Calibration or correction system
Reexamination Certificate
2007-02-20
2008-10-07
Nghiem, Michael P. (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Reexamination Certificate
active
07433791
ABSTRACT:
A method of calibrating a simulation model of a photolithography process. The method includes the steps of defining a set of input data; defining a simulation model having model parameters which affect the simulation result produced by the simulation model; performing a first stage calibration process in which the model parameters and alignment parameters are adjusted such that the simulation result is within a first predefined error tolerance; and performing a second stage calibration process in which the alignment parameters are fixed and the model parameters are adjusted such that the simulation result is within a second predefined error tolerance.
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Hsu Duan-Fu Stephen
Park Sang-bong
Tejnil Edita
ASML Masktools B.V.
Khuu Cindy H
Nghiem Michael P.
Pillsbury Winthrop et al.
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