Method of optimizing focus of optical inspection apparatus...

Details Method of optimizing focus of optical inspection apparatus... Method of optimizing focus of optical inspection apparatus...

2006-08-01

2006-08-01

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237500, C250S559450, C382S149000

Reexamination Certificate

active

07084969

ABSTRACT:
According to a method of optimizing a focus of an optical inspection apparatus, a first light is irradiated onto a substrate. Then, the first light is reflected on the substrate to form a second light. The second light is sensed with various foci to form image information corresponding to each of the foci. Then, a relation between foci of the optical inspection apparatus and gain value corresponding to the image information is obtained. Then, the focus corresponding to a minimum gain value is set up as an optimized focus. Thus, a focus of an optical inspection apparatus is accurately adjusted to enhance efficiency of defecting defects, so that defects of semiconductor apparatus are more accurately detected.

REFERENCES:
patent: 6298019 (2001-10-01), Watanabe et al.
patent: 6338926 (2002-01-01), Ku et al.
patent: 6696679 (2004-02-01), Graef et al.
patent: 2004/0141640 (2004-07-01), Lee et al.
patent: 2004/0150813 (2004-08-01), Kim et al.
patent: 6-281409 (1994-10-01), None
patent: 1999-023205 (1999-03-01), None
patent: 1999-0072263 (1999-09-01), None
English language abstract of Japanese Publication No. 6-281409.
English language abstract of Korean Publication No. 1999-0072263.
English language abstract of Korean Publication No. 1999-023205.

Affiliated with

Also associated with

Rating

Method of optimizing focus of optical inspection apparatus... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of optimizing focus of optical inspection apparatus..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of optimizing focus of optical inspection apparatus... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3670509