Method of operating an electron beam measuring device

Details Method of operating an electron beam measuring device Method of operating an electron beam measuring device

1989-10-10

1991-08-20

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250306, 250310, H01J 3726

Patent

active

050417240

ABSTRACT:
In modern electron beam measuring devices the thermal La/B6 or field emission source is replaced by a photocathode acted upon by a pulsed laser beam. Since the width of photoelectron pulses corresponds approximately to the width of the laser pulses, theses devices are particularly suitable for stroboscopic measurements in fast gallium arsenide circuits. The expenditure on apparatus for generating the photoelectron pulses is considerable since means for doubling the frequency of the primary laser light are necessary. It is therefore proposed to irradiate the cathode of the electron beam measuring device with photons of energy E.sub.Ph <W (W:=electron work function of the cathode material) and to reduce the work function with the aid of an external electrical field to such an extent that photoemission occurs, but not field emission.

REFERENCES:
patent: 2243362 (1941-05-01), Sukumlyn
patent: 3864572 (1975-02-01), van der Mast et al.
patent: 4096386 (1978-06-01), Rempfer et al.
patent: 4667101 (1987-05-01), Siekhaus
patent: 4764674 (1988-08-01), Kinoshita

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