Method of operating a particle-beam apparatus

Details Method of operating a particle-beam apparatus Method of operating a particle-beam apparatus

1973-08-29

1977-06-21

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, G01N 2304

Patent

active

040313905

ABSTRACT:
A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.

REFERENCES:
patent: 2986634 (1961-05-01), Le Poole
patent: 3087057 (1963-04-01), Gutter
patent: 3134899 (1964-05-01), Guyenot
patent: 3137791 (1964-06-01), Gutter
patent: 3614311 (1971-10-01), Fujiyasu

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