Method of obtaining accurate compositional information of multi-

Details Method of obtaining accurate compositional information of multi- Method of obtaining accurate compositional information of multi-

1989-06-22

1990-07-24

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Including a radioactive source

250341, 250339, 2503581, 2503591, G01N 2302, G01N 2135

Patent

active

049437216

ABSTRACT:
The present invention relates to a method, or process, for deriving compositional information from a multi-layer composition which includes the steps of obtaining multi-layer fractional composition information using a non-contact gauge such as an FTIR gauge; obtaining additional multi-layer composition information using a beta gauge; and, correcting for beta ray absorption differences among the layers of the multi-layer composition by combining the multi-layer fractional composition information with the additional multi-layer composition information obtained using the beta gauge.

REFERENCES:
patent: 4243882 (1981-01-01), Yasujima et al.
patent: 4289964 (1981-09-01), Baker
patent: 4574194 (1986-03-01), Coats et al.

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