Method of observing electron microscopic images and an apparatus

Details Method of observing electron microscopic images and an apparatus Method of observing electron microscopic images and an apparatus

1992-10-13

1994-09-06

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 37295

Patent

active

053450809

ABSTRACT:
An electron microscopic image observing method and an apparatus for carrying out the same enables the observation of an electron microscopic image of a specimen by irradiating the specimen with an electron beam and detecting the electron beam after it has transmitted through the specimen. The electron beam transmitted through the specimen is deflected so that the deflection thereof varies with time, and is allowed to pass through an aperture only when the deflection thereof is within a predetermined range of deflection, whereby the electron beam transmitted through the specimen and passed through the aperture is then detected. Thus, the electron microscopic image observing method and the apparatus for carrying out the same enables the observation of time-resolved electron microscopic images of a specimen having internal physical properties varying with time.

REFERENCES:
patent: 2991361 (1961-07-01), Herrmann
patent: 3628012 (1971-12-01), Plows et al.
patent: 3917946 (1975-11-01), van Oostrum
patent: 4366380 (1982-12-01), Mirkin
patent: 4399360 (1983-08-01), Fotino
patent: 4712057 (1987-12-01), Pau
patent: 5004918 (1991-04-01), Tsuno et al.
patent: 5153434 (1992-10-01), Yajima

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