Method of mounting a target plate to be cooled into a vacuum pro

Details Method of mounting a target plate to be cooled into a vacuum pro Method of mounting a target plate to be cooled into a vacuum pro

Filed on

1992-05-04

Date issued

1993-12-14

Examiner

Nguyen, Nam

Patent Class

Chemistry: electrical and wave energy

SubClass

Processes and products

SubSubClass

Coating, forming or etching by sputtering

Other Related Categories

20429809, 20429812, C23C 1434

Type

Patent

Status

active

Patent number

052698947

Description

ABSTRACT:
A method of mounting a vacuum process arrangement comprises providing a cooling plate having at least one channel and at least one bayonet locking means. A heat conducting membrane is then placed over each channel of the cooling plate. A target plate having at least one bayonet locking means is also provided. The locking plate is then locked to the cooling plate over the channels by engaging the bayonet locking means of the target plate with the bayonet locking means of the cooling plate by limited relative axial and rotational movement between the plates. Finally, a cooling medium is introduced in the channels of the cooling plate and pressurized.

REFERENCES:
patent: 5032246 (1991-07-01), Blazic et al.
patent: 5071535 (1991-12-01), Hartig et al.

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