Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent
1996-08-08
1999-09-28
Breneman, Bruce
Semiconductor device manufacturing: process
Chemical etching
Combined with the removal of material by nonchemical means
216 88, 451539, 156345LP, H01L 21302
Patent
active
059587946
ABSTRACT:
A method of modifying an exposed surface of a semiconductor wafer that includes the steps of:
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Bruxvoort Wesley J.
Culler Scott R.
Ho Kwok-Lun
Kaisaki David A.
Kessel Carl R.
Alanko Anita
Breneman Bruce
Minnesota Mining and Manufacturing Company
Pastirik Daniel R.
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