Method of metallizing silicon-containing gel for a solid state l

Details Method of metallizing silicon-containing gel for a solid state l Method of metallizing silicon-containing gel for a solid state l

1991-07-01

1992-08-04

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, 20419226, 20419227, C23C 1434

Patent

active

051356309

ABSTRACT:
A solid state light modulator structure useful in a video display system includes a deformable silicon containing gel layer on an array of charge storage elements, and an adherent, highly light reflective metal (e.g., Ag) electrode layer formed directly on the surface of the gel layer by sputtering in a non-reactive atmosphere.

REFERENCES:
patent: 4299450 (1981-11-01), Funada et al.
patent: 4626920 (1986-12-01), Glenn

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