Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-11-01
2005-11-01
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S311000
Reexamination Certificate
active
06960764
ABSTRACT:
The performance of a scanning electron microscope (SEM) (10) is determined by scanning, with this SEM, porous silicon surface areas (PSF, PSC) each having a different average pore size, calculating the Fourier transform spectra (Fc) of the images of the surface areas and extrapolating the resolution (R) at a zero signal-to-noise ratio (SNR) from the width (W(1/e)), the signal amplitude (Sa) and the noise offset (NL) of the spectra. A test sample provided with the different surface areas is obtained by anodizing a silicon substrate (Su) at a constant electric current, while continuously decreasing the substrate area exposed to the etching electrolyte (El).
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Dirksen Peter
Elfrink Rene Johan Gerrit
Juffermans Casparus Anthonius Henricus
Gurzo Paul M.
Koninklijke Philips Electronics , N.V.
Lee John R.
Zawilski Peter
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