Method of measuring the bent shape of a movable mirror of an exp

Details Method of measuring the bent shape of a movable mirror of an exp Method of measuring the bent shape of a movable mirror of an exp

1994-11-09

1995-12-05

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356358, 356363, 356401, 355 53, 355 77, G01B 1100

Patent

active

054734355

ABSTRACT:
A method of measuring a bent shape of a movable mirror of an exposure apparatus, which includes:

REFERENCES:
patent: 4677301 (1987-06-01), Tanimoto et al.
patent: 4871237 (1989-10-01), Anzai et al.
patent: 5117255 (1992-05-01), Shiraishi et al.
patent: 5151749 (1992-09-01), Tanimoto et al.

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