Method of measuring small pads on a substrate

Details Method of measuring small pads on a substrate Method of measuring small pads on a substrate

2005-02-22

2005-02-22

Font, Frank G. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S364000

Reexamination Certificate

active

06859279

ABSTRACT:
A method of measuring a small area on a substrate with an ellipsometer, comprising orienting a substrate with respect to the ellipsometer such that an elliptical light spot produced by the ellipsometer fits diagonally within the test area. Then measuring the surface properties of the substrate within the test area with the ellipsometer.

REFERENCES:
patent: 5596406 (1997-01-01), Rosencwaig et al.
patent: 6707056 (2004-03-01), Fanton et al.

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