Method of measuring sizes in scan microscopes

Details Method of measuring sizes in scan microscopes Method of measuring sizes in scan microscopes

2005-04-12

2005-04-12

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Methods

C250S310000

Reexamination Certificate

active

06878935

ABSTRACT:
For measuring sizes in a scanning measuring microscope a nominal magnification is selected so that an object image occupies a substantial part of a field of view, an actual magnification is calculated depending on a coordinate on a screen along the direction of measurement, the object is positioned on a microscope table so that a line of scanning coincides with a direction of measurement and scanned by an electron beam to obtain a function of a video signal, points are localized which correspond to left and right edges of the object on a curve, and a size of the object is determined from the coordinates of the left and right edges and the magnification of the microscope changing from one point to the other.

REFERENCES:
patent: 4766311 (1988-08-01), Seiler et al.
patent: 4999496 (1991-03-01), Shaw et al.
patent: 6184524 (2001-02-01), Brink et al.
patent: 6563116 (2003-05-01), Nikitin

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