Method of measuring asymmetry in a scatterometer, a method...

Details Method of measuring asymmetry in a scatterometer, a method... Method of measuring asymmetry in a scatterometer, a method...

2007-03-30

2010-02-02

Chowdhury, Tarifur R. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07656518

ABSTRACT:
In a method of measuring asymmetry in a scatterometer, a target portion is illuminated twice, first with 0° of substrate rotation and secondly with 180° of substrate rotation. One of those images is rotated and then that rotated image is subtracted from the other image. In this way, asymmetry of the scatterometer can be corrected.

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