Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate
2006-08-22
2006-08-22
Lee, Eddie (Department: 2811)
Semiconductor device manufacturing: process
Making passive device
Trench capacitor
C438S243000, C257S301000, C257SE21014
Reexamination Certificate
active
07094660
ABSTRACT:
A semiconductor device has a stabilizing member that encloses an upper portion of a storage electrode to improve structural stability. A dielectric layer and a plate electrode are successively formed on the storage electrode including a stabilizing member. Since the stabilizing member includes a protruding portion to support the storage electrode and an adjacent storage electrode, all of the storage electrodes in a unit cell of a semiconductor device are structured to prevent a collapse. Also, the semdevice can have a very high height without collapse when the capacitors have extremely high aspect ratios. Therefore, the capacitors may have greatly enhanced capacitance in comparison with a conventional capacitor.
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Arena Andrew O.
Lee Eddie
Samsung Electronics Co,. Ltd.
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