Method of manufacturing thin-film electronic device having a...

Details Method of manufacturing thin-film electronic device having a... Method of manufacturing thin-film electronic device having a...

2006-07-21

2009-06-30

Nguyen, Khiem D (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S668000, C257SE21008

Reexamination Certificate

active

07553765

ABSTRACT:
A method of manufacturing a thin-film electronic device comprising providing a dielectric layer on a base, providing a first electrically conductive layer having a first opening and covering at least part of the dielectric layer; and forming a first through-hole extending through the base and communicating with the first opening. A second electrically conductive layer may be provided on the base, and a dielectric layer may be provided so as to cover at least part of this second conductive layer.

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patent: A 11-260148 (1999-09-01), None
patent: A 2004-048045 (2004-02-01), None

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