Method of manufacturing thermal type flow sensing elements

Details Method of manufacturing thermal type flow sensing elements Method of manufacturing thermal type flow sensing elements

2006-02-07

2006-02-07

Wilczewski, Mary (Department: 2818)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

C438S017000, C438S054000, C438S460000

Reexamination Certificate

active

06995028

ABSTRACT:
A method of manufacturing thermal type flow sensing elements is provided which improves workability and reliability without increasing manufacturing costs. Each flow sensing element comprises two lead patterns that are connected to both ends of a heat generating resistance and two lead patterns that are connected to both ends of a temperature sensing resistance. The lead patterns connected to the ends of the heat generating resistance are both connected to dummy patterns in the vicinity of electrodes. As for the lead patterns connected to the ends of the temperature sensing resistance, either one of them is connected to the dummy pattern in the vicinity of the electrode. The dummy patterns are patterned so as to provide parallel connection of the heat generating resistances of a plurality of flow sensing elements formed on a substrate, through the lead patterns.

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