Method of manufacturing semiconductor device with MIS capacitor

Details Method of manufacturing semiconductor device with MIS capacitor Method of manufacturing semiconductor device with MIS capacitor

1985-03-18

1987-02-24

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29576W, 29580, 148187, 148DIG50, 156646, 156648, 156651, 156653, 156657, 156662, 357 51, 357 55, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

046455647

ABSTRACT:
A semiconductor device with a metal-insulator-semiconductor capacitor has:

REFERENCES:
patent: 4495025 (1985-01-01), Haskell
patent: 4534824 (1985-08-01), Chen
Japanese Utility Model Preliminary Publication Sho 56-43171, Apr. 20, 1981, p. 147.

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