Method of manufacturing semiconductor device and support...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices

Reexamination Certificate

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C438S458000, C438S459000

Reexamination Certificate

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07459343

ABSTRACT:
A method of manufacturing a semiconductor device is disclosed. The method comprises a first step of grinding a second principle surface of a semiconductor substrate opposite to a first principle surface of the semiconductor substrate on which semiconductor device elements are formed, a second step of attaching a support structure configured to support the semiconductor substrate to the second principle surface after the first step, and a third step of detaching the semiconductor substrate from the support structure.

REFERENCES:
patent: 6444310 (2002-09-01), Senoo et al.
patent: 6492195 (2002-12-01), Nakanishi et al.
patent: 6908784 (2005-06-01), Farnworth et al.
patent: 04-336448 (1992-11-01), None
patent: 2002 231854 (2002-08-01), None
patent: 2002 270720 (2002-09-01), None
patent: 2003-324142 (2003-11-01), None
Notification of the First Office Action dated Jan. 4, 2008 for the corresponding CN200510071370.5.

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