Method of manufacturing semiconductor chip using laser light...

Details Method of manufacturing semiconductor chip using laser light... Method of manufacturing semiconductor chip using laser light...

2011-03-15

2011-03-15

Richards, N Drew (Department: 2895)

Semiconductor device manufacturing: process

Semiconductor substrate dicing

Having specified scribe region structure

C438S460000

Reexamination Certificate

active

07906410

ABSTRACT:
In a method in which a semiconductor wafer1having integrated circuits3formed in a plurality of chip regions and test patterns4formed in scribe lines2ais divided by a plasma etching process so as to manufacture individual semiconductor chips, in the semiconductor wafer1, a protection sheet5which constitutes a mask in the plasma etching process is adhered onto a front plane1athereof where the integrated circuits3have been formed; since laser light9ais irradiated along the scribe lines2a, only a predetermined width of the protection sheet5is removed so as to form a mask having a plasma dicing-purpose opening portion5b; and also, the test patterns4are removed by the laser light9ain combination with a front plane layer of the semiconductor wafer1. As a result, the test patterns4can be removed in a higher efficiency and in simple steps, while the general purpose characteristic can be secured.

REFERENCES:
patent: 6642127 (2003-11-01), Kumar et al.
patent: 7183137 (2007-02-01), Lee et al.
patent: 2006/0009008 (2006-01-01), Kaneuchi et al.
patent: 2006/0205182 (2006-09-01), Soejima
patent: 2001-250800 (2001-09-01), None
patent: 2005-191039 (2005-07-01), None
patent: 2006-075725 (2006-07-01), None
patent: 2006-179768 (2006-07-01), None
patent: 2008-023489 (2008-02-01), None
International Search Report Dated May 7, 2008.

Affiliated with

Also associated with

Rating

Method of manufacturing semiconductor chip using laser light... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of manufacturing semiconductor chip using laser light..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing semiconductor chip using laser light... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2733682