Method of manufacturing rigid floating microstructure elements a

Details Method of manufacturing rigid floating microstructure elements a Method of manufacturing rigid floating microstructure elements a

1996-07-10

1999-07-27

Niebling, John F.

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

H01L 2100

Patent

active

059305940

ABSTRACT:
A method of manufacturing elements of floating rigid microstructures and a device equipped with such elements.
This method of manufacturing at least one element of a microstructure (104, 116) in a substrate including a stacking of a support layer (100), a layer (102) of sacrificial material and a structure layer (104) comprises the following steps:

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