Method of manufacturing platinum temperature sensor

Details Method of manufacturing platinum temperature sensor Method of manufacturing platinum temperature sensor

1992-06-19

1993-09-14

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566591, 156664, 156901, 29620, 20419232, C23F 100, B44C 122

Patent

active

052445364

ABSTRACT:
A method of manufacturing a platinum temperature sensor includes the step of obtaining a meandering resistive circuit by forming grooves in a platinum film which is provided on an insulating substrate. In order to provide a high resistance value by reducing the line width of the resistive circuit, as well as to miniaturize the platinum temperature sensor, this method comprises steps of forming a resist film on the platinum film provided on the insulating substrate, patterning the resist film by photolithography, and using the patterned resist film as a mask to finely work the platinum film by Ar.sup.+ ion etching for forming the grooves. Due to formation of such grooves, the platinum film defines a meandering pattern portion which provides the resistive circuit.

REFERENCES:
patent: 4248688 (1981-03-01), Gartner et al.
patent: 4624138 (1986-11-01), Ono et al.
patent: 4805296 (1989-02-01), Jinda et al.

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