Method of manufacturing patterned ferroelectric media

Details Method of manufacturing patterned ferroelectric media Method of manufacturing patterned ferroelectric media

2011-04-12

2011-04-12

Pizarro, Marcos D. (Department: 2814)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257SE27104, C257SE29164

Reexamination Certificate

active

07923262

ABSTRACT:
A method of manufacturing patterned ferroelectric media, which includes forming an electrode on a substrate; forming features having a predetermined pattern on the electrode, the features including a precursor for forming a ferroelectric material; and reacting a source material with the precursor features to transform the precursor features into ferroelectric features. Also disclosed is a method which includes forming on a substrate an electrode having wells and precursor features formed in the wells of the electrode, the precursor features including a precursor for forming a ferroelectric material; and reacting a source material with the precursor features to transform the precursor features into ferroelectric features. The above first embodiment relates to non-embedded type media, and the above second embodiment relates to embedded type media.

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