Method of manufacturing nozzle plate and method of...

Etching a substrate: processes – Forming or treating thermal ink jet article

Reexamination Certificate

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Details

C216S037000, C347S045000, C347S047000, C347S068000, C347S072000

Reexamination Certificate

active

08038891

ABSTRACT:
The method of manufacturing a nozzle plate includes: a lyophobic film forming step of preparing a nozzle plate having a recess-shaped counterbore section and a nozzle opened in a bottom surface of the counterbore section, and forming a lyophobic film on a surface of the nozzle plate including the bottom surface of the counterbore section of the nozzle plate and at least a portion of an inner wall of the nozzle; an abutting step of preparing a protective plate having a projecting section, and abutting a top surface of the projecting section of the protective plate against the bottom surface of the counterbore section of the nozzle plate in such a manner that the top surface of the projecting section of the protective plate makes tight contact with an opening edge of the nozzle on a liquid ejection side of the nozzle plate; a lyophobic film removing step of removing the lyophobic film from the inner wall of the nozzle of the nozzle plate by etching the nozzle plate from a liquid supply side which is opposite to a side of the nozzle plate that is abutted against the protective plate; and a separating step of separating the protective plate from the nozzle plate.

REFERENCES:
patent: 6310641 (2001-10-01), Mrvos et al.
patent: 7025439 (2006-04-01), Laurer et al.
patent: 7441871 (2008-10-01), Nishijima
patent: 7530667 (2009-05-01), Furukawa et al.
patent: 7562964 (2009-07-01), Furukawa et al.
patent: 7568785 (2009-08-01), Deguchi et al.
patent: 9-267478 (1997-10-01), None
patent: 2006-27155 (2006-02-01), None
patent: 2007-50583 (2007-03-01), None

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