Method of manufacturing non-linear resistive element array

Details Method of manufacturing non-linear resistive element array Method of manufacturing non-linear resistive element array

1988-03-29

1990-01-23

Dees, Jose G.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430 20, 430330, 350334, G03C 500

Patent

active

048957895

ABSTRACT:
A method for manufacturing a non-linear resistive element array on a substrate, comprising: depositing a first conductive layer on the substrate and selectively forming the layer in a desired pattern; depositing a non-linear resistive layer on the first conductive layer; depositing a second conductive layer on the non-linear resistive layer; forming the second conductive layer in a desired pattern by etching process using a patterned resist layer as a mask; and forming the non-linear resistive layer in a desired pattern using the resist layer as a mask.

REFERENCES:
patent: 4738513 (1988-04-01), Nishiura et al.
patent: 4828370 (1989-05-01), Suzuki
patent: 4842372 (1989-06-01), Toyama

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