Method of manufacturing micromirror array and method of...

Details Method of manufacturing micromirror array and method of... Method of manufacturing micromirror array and method of...

2006-02-15

2008-05-13

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

07372618

ABSTRACT:
A method of manufacturing a micromirror array and a method of manufacturing an optical device having a micromirror. The method of manufacturing a micromirror array includes forming an adhesion layer on a substrate and a magnetic layer on the adhesion layer, patterning the adhesion layer and magnetic layer, magnetizing the magnetic layer and forming a bonding layer on each side of the adhesion layer and the magnetic layer. The substrate is severed into units, each unit including the adhesion layer, the magnetic layer, and the bonding layer. A mirror surface is formed on a side of the substrate to form a unit micromirror structure. The unit micromirror structure is then placed in a holder to form a micromirror array.

REFERENCES:
patent: 2001/0048548 (2001-12-01), Yee
patent: 1 475 792 (2004-11-01), None

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