Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate
2005-03-18
2008-03-18
Geyer, Scott B. (Department: 2812)
Semiconductor device manufacturing: process
Chemical etching
Combined with coating step
C257SE21029
Reexamination Certificate
active
07344990
ABSTRACT:
A method of manufacturing micro-structure elements by utilizing molding glass includes the steps of forming a mold having a micro-structure pattern thereon by using an electroforming process, making a copy of the micro-structuring pattern on a glass structure by using glass molding technology, and filling clothing material on the glass substrate to form a micro-structure element with less complex and cost, thereby being suitable for mass production.
REFERENCES:
patent: 5772905 (1998-06-01), Chou
patent: 2005/0067286 (2005-03-01), Ahn et al.
Chen Hsiu-Hsiang
Chern Jyh-Long
Chu Chang-Sheng
Guo Huang-Chen
Lai Pong
Geyer Scott B.
Industrial Technology Research Institute
Ullah Elias
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