Method of manufacturing member pattern, method of...

Details Method of manufacturing member pattern, method of... Method of manufacturing member pattern, method of...

2006-06-27

2006-06-27

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S311000, C430S319000, C430S325000, C430S328000, C430S330000

Reexamination Certificate

active

07067236

ABSTRACT:
The present invention provides a method of manufacturing a member pattern having a patterned member on a substrate, the method including: a first exposure step of exposing a desired region of a negative type photosensitive material applied to the substrate to light from a first direction; a second exposure step of exposing the desired region of the negative type photosensitive material to light from a second direction opposite to the first direction; a development step of performing development after the exposure steps to form a precursor pattern of the member; and a step of baking the precursor pattern.

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