Method of manufacturing inkjet print head

Details Method of manufacturing inkjet print head Method of manufacturing inkjet print head

2011-03-01

2011-03-01

Banks, Derris H (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S829000, C029S830000, C029S831000, C029S832000, C029S841000, C216S027000, C347S068000

Reexamination Certificate

active

07895750

ABSTRACT:
A method of manufacturing an inkjet print head that includes an improved process of forming an ink feed hole, thereby enabling an increase in productivity and a favorable ink supply via the ink feed hole. The method includes preparing a substrate on which a heater to heat an ink is formed on the front side thereof, forming a flow passage formation layer on the front side of the substrate such that the flow passage formation layer defines an ink flow passage, forming a nozzle layer provided with a nozzle on the flow passage formation layer, forming a first protective layer such that the first protective layer covers the flow passage formation layer and the nozzle layer, applying a mask material used to etch the substrate to the rear side of the substrate, applying a second protective layer to the lateral side of the substrate to protect the lateral side of the substrate, and forming an ink feed hole on the substrate by wet etching. Tantalum (Ta) is used as the mask material. Parylene is used as the second protective layer.

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