Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article
Reexamination Certificate
2000-11-17
2003-02-11
McPherson, John A. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making named article
C430S315000, C430S319000, C427S066000
Reexamination Certificate
active
06517996
ABSTRACT:
CROSS-REFERENCE TO RELATED APPLICATION
This application claims the priority benefit of Taiwan application serial no. 89115831, filed Aug. 7, 2000.
BACKGROUND OF THE INVENTION
1. Field of Invention
The present invention relates to a method of manufacturing a full-color organic electro-luminescent (OEL) device. More particularly, the present invention relates to a method of manufacturing a full-color organic electro-luminescent (OEL) device using a special designed process and equipment, in which the dry-film photo-resist as the shadow mask is made on the insulated pad and the deposition of RGB sub-pixels is carried out in the same time.
2. Description of Related Art
Investigation of on organic electro-luminescent material began in the 1960s and more than 30 years of research data has been accumulated right now. When the investigation of single crystal organic compound was first reported in 1963, a high voltage of around 400 volts had to be applied before luminescent occurs. Yet, the brightness level produced by the luminescent material is too weak to have any real-life application.
In 1987, Kodak in America reported some success in producing organic low-molecular-weight electro-luminescent device in Appl. Phys. Lett., Vol.51, p914(1987). In 1990, Cambridge University in England was similarly successful in utilizing the polymer material to produce electro-luminescent devices in Nature, Vol.347, p539 (1990). From these earlier researches, foundation for investigating actual application of electro-luminescent devices by governments, institutes and academies is laid.
Highly desirable properties of electro-luminescent material include self-illumination, wide viewing angle (up to 160°), rapid response, low driving voltage and full-color spectrum. Hence, electro-luminescent been highly regarded as the planar display techniques of the future. At present, the development of electro-luminescent devices has reached such a high degree of sophistication that electro-luminescent display can be out in the next generation of planar color displays. These planar luminescent devices can be used in high-quality, full-color planar displays such as miniature display panel, outdoor display panel, computer and television screens.
At present, research in electro-luminescent products is directed towards the investigation of device and material structure. Rapid development in low-molecular-weight electro-luminescent material has produced the first prototype full-color organic electro-luminescent display. However, some technical problems still prevent the use polymer material in full-color organic electro-luminescent devices. One major difficulty lies in the alignment of red-green-blue (R-G-B) sub-pixels in the spin-coating process.
Color display techniques using organic electro-luminescent material can be roughly divided into two sub-categories, namely, direct full-color display techniques and indirect full-color display techniques.
Literature of direct full-color display techniques includes:
1. A full-color electro-luminescent device structure having micro-cavities of various depths is developed in Cambridge (Adv. Mater., Vol.7, p541 (1996); Synth. Met., Vol. 76, p137(1996)), by Cimrova et. el (Appl. Phys. Lett., Vol. 69, p608 (1996)); in Bell Lab and Motorola (R.O.C patent no. 301,802, 318,284, 318,966). However, the method of production is rather complicated. Furthermore, producing micro-cavities at different depth levels is a high-cost process.
2. A method of stacking organic electro-luminescent element capable of emitting blue light and organic electro-luminescent element capable of emitting red light on top of a substrate is developed jointly by Princeton and Southern California University (Appl. Phys. Lett., Vol.69, p2959 (1996)); R.O.C. patent no. 294,842). However, the method uses difficult fabrication techniques. Moreover, the metal electrodes between the light-emitting element blocks off a portion of the red and green light, thereby lowering the brightness level.
3. A method that uses X-Y addressing pattern for fabricating a full-color organic electro-luminescent device capable of different color pixels is developed by Kodak Co. of America (U.S. Pat. No. 5,294,869 and 5,294,870). It utilizes the shift of metal mask to form R-G-B individual sub-pixels in the deposition process so that it is not good for the applications of higher resolution and larger substrate.
4. A method of fabricating full-color organic electro-luminescent device by photo bleaching is developed by professor Kido of Japan. The method uses light to damage the resonance structure of red-energy-gap material of the light-emitting layer so that energy gap of the material is increased, green-blue-red pixels are formed and pixels of different colors are fixed for full-color display.
Besides the aforementioned production methods, a method that utilizes an ink-jet printing technique instead of spin-coating to fabricate a polymer electro-luminescent device is developed by Yang Yang (Science, Vol.279, p 1135(1990)). The method can reduce the consumption of polymer material and can produce whatever display pattern and words. Size of ink drop can be as small as 30 &mgr;m. The method can be applied to produce a full-color display device. However, this method is new and many technical problems still exists. Problems such as the transportation of indium-tin oxide glass, the type of solvents to be used and the blocking of inkjet nozzle need to be addressed.
Literature of indirect full-color display techniques includes:
1. TDK Co. has developed a full-color organic electro-luminescent device that uses a color filter. First, a conventional method is used to fabricate a white light electro-luminescent component. Red, green and blue color filters are added to the white-light-emitting pixels so that the white light is converted into red, green and blue light respectively. Although this method is capable of producing a full-color display device from a white-light-emitting component, the filters greatly reduce light intensity of the device.
2. A full-color organic electro-luminescent device having a color conversion layer has been developed by Idemitsu Kosan. The device has a structure similar to a light-emitting device with filters. Although light conversion of the blue light can be used to produce a full-color display device, the process of forming separating column is complicated. Moreover, using a conversion layer for red, green and blue will lower light intensity of the device.
Apart from the previous methods, another direct full-color display technique similar to this invention is presented and compared as below.
Kodak of America has introduced an X-Y address-patterning method for producing a full-color organic electro-luminescent device in U.S. Pat. No. 5,294,869.
FIGS. 1A through 1E
are schematic cross-sectional views showing the steps for producing a full-color organic electro-luminescent device according to a conventional X-Y addressing pattern. First, as shown in
FIG. 1A
, a vertical shadow mask is formed over an indium-tin-oxide glass substrate
100
by a wet photo-resist production or a dielectric film deposition method. As shown in
FIG. 1B
to
FIG. 1D
, three vapor deposition operations are carried out to deposit red, green and blue color materials. In the first vapor deposition operation
104
shown in
FIG. 1B
, a first type of material is deposited on the substrate
100
at an angle &thgr;
1
to form a sub-pixel
106
. In the second vapor deposition operation
108
as shown in
FIG. 1C
, a second type of material is deposited on the substrate
100
at a negative angle &thgr; to form a sub-pixel
110
. In the third vapor deposition operation
112
shown in
FIG. 1D
, a third type of material is deposited on the substrate
100
vertically to form a sub-pixel
114
. As shown in
FIG. 1E
, a metal layer
116
is formed by the fourth vapor deposition operation
118
at an angle &thgr;
2
. Utilizing the vertical shadow mask
102
, the interconnection between sub-pixels is prevented. Although this method is able to produce a full-co
Chang En-Chung
Chao Ching-Ian
Hsieh Chia-Fen
Tsai Rung-Ywan
Industrial Technology Research Institute
J.C. Patents
McPherson John A.
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