Method of manufacturing film thermopile

Details Method of manufacturing film thermopile Method of manufacturing film thermopile

1975-09-23

1978-07-04

Esposito, Michael F.

Metal treatment

Compositions

Heat treating

136201, 136225, 136238, 136240, 252 623T, 427 53, 427 54, 427 55, 427 56, 427 74, 427 75, 427 76, 427 82, 427 87, 427261, 427372R, 427380, H01L 2100, H01L 3516

Patent

active

040986179

ABSTRACT:
A method of manufacturing a film thermopile, whereby a film of a thermoelectric semiconductor material which is an n-type stoichiometric solid solution containing Bi.sub.2 Te.sub.3 and Sb.sub.2 Te.sub.3 is deposited on a substrate. Then heating is effected so that adjacent arms of the film are at different temperatures, some at a temperature of not above 300.degree. C, and others at a temperature of not less than 350.degree. C.

REFERENCES:
patent: 3020326 (1962-02-01), Fredrick
patent: 3441449 (1969-04-01), Green

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