Method of manufacturing field emission device

Details Method of manufacturing field emission device Method of manufacturing field emission device

2011-05-17

2011-05-17

Won, Bumsuk (Department: 2889)

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

C445S051000, C313S495000, C313S496000, C313S497000

Reexamination Certificate

active

07942714

ABSTRACT:
A method of manufacturing a field emission display includes: sequentially forming a cathode electrode, an insulating layer, and a gate material layer on a substrate; forming a metal sacrificial layer on an upper surface of the gate material layer; forming a through hole to expose the insulating layer in the metal sacrificial layer and the gate material layer; forming an emitter hole to expose the cathode electrode in the insulating layer exposed through the through hole; forming a gate electrode by etching the gate material layer constituting an upper wall of the emitter hole; and forming an emitter of Carbon NanoTubes (CNTs) on an upper surface of the cathode electrode located below the through hole.

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patent: 2004/0080260 (2004-04-01), Park et al.
patent: 2005/0040752 (2005-02-01), Lee et al.
patent: 2007/0275627 (2007-11-01), Jung et al.

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