Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate
2005-12-27
2005-12-27
Duda, Kathleen (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
C430S396000
Reexamination Certificate
active
06979525
ABSTRACT:
A method of manufacturing an electronic device that includes the step of forming a pattern on a substrate by using a halftone phase shift mask where the halftone phase shift mask includes a translucent phase shift pattern having an aperture; and an auxiliary pattern, disposed near the aperture and having as a principal component an organic film which possesses a light attenuating property or a light shielding property against exposure light. The halftone phase shift mask fabricating Turn-Around-Time (TAT) is shortened thereby shortening the development time required for an electronic device, the production cost of which has also been reduced.
REFERENCES:
patent: 4586822 (1986-05-01), Tanimoto
patent: 5925484 (1999-07-01), Shima et al.
patent: 5935736 (1999-08-01), Tzu
patent: 6048647 (2000-04-01), Miyazaki et al.
patent: 6214497 (2001-04-01), Stanton
patent: 6746812 (2004-06-01), Watanabe et al.
patent: 56-030129 (1981-03-01), None
patent: 59-022050 (1984-02-01), None
patent: 6-308715 (1993-04-01), None
patent: 05-289307 (1993-11-01), None
patent: 9-90601 (1996-02-01), None
patent: 11-15130 (1997-06-01), None
Tanaka Toshihiko
Tattori Takashi
A. Marquez, Esq. Juan Carlos
Duda Kathleen
Fisher Esq. Stanley P.
Reed Smith LLP
Renesas Technology Corp.
LandOfFree
Method of manufacturing electronic device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of manufacturing electronic device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of manufacturing electronic device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3466425