Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1999-06-09
2000-05-30
Diamond, Alan
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
2041921, 20419215, 20419226, 117105, 117106, 117107, 117108, 427569, 427576, 427128, 427131, 427132, G11B 1110, G11B 1112, C23C 1434
Patent
active
060687398
ABSTRACT:
A method of manufacturing a data recording medium for recording and reproducing data by use of a magnetic field or light and formed of an ordered alloy thin film comprising the steps of forming at least one underlayer principally containing an element or a compound selected from the group consisting of Cr, Pt, Pd, Au, Fe, Ni, MgO, NiO and controlled in such a way that a crystal plane having a crystal lattice face of a Miller index (100) is in parallel to a substrate, and forming an ordered alloy layer with L1.sub.0 crystal structure by sputter deposition within the range satisfying Equation 1: P.times.D>3000, where P is Ar sputter-gas pressure (Pa) and D is a target-substrate distance (mm), is disclosed. When a recording medium is formed of an ordered alloy thin film by using a glass substrate for a hard disk for industrial use, according to the method of the present invention, formation of an ordered phase required for exhibiting large magnetocrystalline anisotropy is accelerated at a low temperature allowing usage of the glass substrate, so that the recording medium is improved in thermal stability.
REFERENCES:
patent: 5363794 (1994-11-01), Lairson et al.
patent: 5603766 (1997-02-01), Visokay et al.
Saito et al, J. Magn. Soc. Jpn., 20:77-80 (nonth unknown), 1996.
Suzuki et al., J. Magn. Soc. Jpn., 21(S2):177-180 (month unknown), 1997.
Iwasaki, Shun-ichi and Nakamura, Yoshihisa; "An Analysis for the Magnetization Mode for the High Density Magnetic Recording"; IEEE Transactions on Magnetics; Mag-13(5):1272-1277; Sep. 1977.
Lu, Pu-Ling and Charap, Stanley H.; "Thermal instabiilty at 10 Gbit/in.sup.2 magnetic recording"; IEEE Transactions on Magnetics; 30(6):4230-4232; Nov. 1994.
Iwasaki, S., et al.; "Gbit/in.sup.2 Perpendicular Recording Using Double Layer Medium and MIG Head"; IEEE Transactions on Magnetics; 32(5):3795-3800; Sep. 1996.
Jiang, W.H. et al; "Bit Density Dependence of Thermal Relaxation in Perpendicular Magnetic Recording"; Journal of J. Appl. Mag. Sec.; 21(4-2):293-295; 1997 (month unknown).
Jiang, W.H., et al.; "Bit Density Dependence of Thermal Relaxation in Perpendicular Magnetic Recording"; J. Magn. Soc. Jpn.; 21:293-295; 1997 (month unknown).
Saito, K., et al.; Magnetic Microstructures of Co-Cr Films Sputter-Deposited at High Ar Pressures; J. Magn. Soc. Jpn.; 20:77-80; 1996 (month unknown).
Coffey, Kevin R., et al.; "High Anisotropy L1.sub.0 Thin Films for Longitudinal Recording"; IEEE Transactions on Magnetics; 31(6):2737-2739; Nov. 1995.
Suzuki, Toshio, et al.; "Preparation and Magnetic Properties of Sputter-Deposited Fe-Pt Thin Films with Perpendicular Anisotropy"; J. Mag. Soc. Jpn.; 21(S2):177-180; 1997 (month unknown).
Watanable, Masato and Homma, Motofumi; "Perpendicular Magnetization of Epitaxial FePT(001) Thin Films with High Squareness and High Coercive Force"; Jp. J. Appl. Phys.; 35(2):1264-1267; Oct. 1, 1996.
Shimvun, Nikkan Kogyo; "Fandamentals of Thin Film Formation"; 108-111 (Date Unknown).
Lee, Li'Lien, et al.; "MgO seed layers for CoCrPt/Cr longitudinal magnetic recording media"; Appl. Phys. Lett.; 67(24):3638-3640; Dec. 11, 1995.
Kataoka, Kiroyuki, et al.; "Magnetic and Recording Characteristics of Cr, Ta, W and Zr Pre-Coated Glass Disks"; IEEE Transactions on Magnetics; 31(6):2734-2736; Nov. 1995.
Saito, K. et al.; "Magnetic Microstructures of Co-Cr Films Sputter-Deposited at High Ar Pressures"; Journal of J. Appl. Mag. Sec.; 20(2):77-80; 1996 (month unknown).
Honda Naoki
Ouchi Kazuhiro
Suzuki Toshio
Diamond Alan
Governor of Akita Prefecture
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