Method of manufacturing array substrate of a liquid crystal disp

Details Method of manufacturing array substrate of a liquid crystal disp Method of manufacturing array substrate of a liquid crystal disp

1997-08-28

2000-02-01

Chaudhari, Chandra

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

438151, 65 321, 65111, 65117, H01L 21336

Patent

active

060202254

ABSTRACT:
A method of manufacturing an array substrate of a liquid crystal display device where the array substrate comprises a glass substrate and a thin film transistor formed on the glass substrate, the method comprising the steps of, heat-treating the glass substrate at a temperature ranging from (Ts-200.degree. C.) to Ts (Ts: a strain point of glass constituting the glass substrate), and quenching the glass substrate by quenching means which is capable of promoting a cooling of the glass substrate and controlling the cooling rate of the glass substrate.

REFERENCES:
patent: 5663077 (1997-09-01), Adachi et al.
patent: 5674304 (1997-10-01), Fukuda et al.

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