Metal working – Means to assemble or disassemble – Means to assemble electrical device
Reexamination Certificate
2008-09-22
2011-11-08
MacArthur, Sylvia R. (Department: 1716)
Metal working
Means to assemble or disassemble
Means to assemble electrical device
C361S234000, C279S128000, C118S725000, C156S345520
Reexamination Certificate
active
08051556
ABSTRACT:
An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.
REFERENCES:
patent: 4455462 (1984-06-01), DeLucia
patent: 4518848 (1985-05-01), Weber
patent: 5059770 (1991-10-01), Mahawila
patent: 5250137 (1993-10-01), Arami et al.
patent: 5280156 (1994-01-01), Niori et al.
patent: 5294778 (1994-03-01), Carmen et al.
patent: 5413360 (1995-05-01), Atari et al.
patent: 5539179 (1996-07-01), Nozawa et al.
patent: 5609720 (1997-03-01), Lenz et al.
patent: 5625526 (1997-04-01), Watanabe et al.
patent: 5685363 (1997-11-01), Orihira et al.
patent: 5761023 (1998-06-01), Lue et al.
patent: 5851641 (1998-12-01), Matsunaga et al.
patent: 5854468 (1998-12-01), Muka
patent: 5925227 (1999-07-01), Kobayashi et al.
patent: 5968273 (1999-10-01), Kadomura et al.
patent: 5978202 (1999-11-01), Wadensweiler et al.
patent: 6031211 (2000-02-01), Mailho et al.
patent: 6051303 (2000-04-01), Katsuda et al.
patent: 6072685 (2000-06-01), Herchen
patent: 6080969 (2000-06-01), Goto et al.
patent: 6080970 (2000-06-01), Yoshida et al.
patent: 6084215 (2000-07-01), Furuya et al.
patent: 6100506 (2000-08-01), Colelli, Jr. et al.
patent: 6140612 (2000-10-01), Husain et al.
patent: 6151203 (2000-11-01), Shamouilian et al.
patent: 6215641 (2001-04-01), Busse et al.
patent: 6259592 (2001-07-01), Ono
patent: 6310755 (2001-10-01), Kholodenko et al.
patent: 6365879 (2002-04-01), Kuibira et al.
patent: 6379222 (2002-04-01), Wise et al.
patent: 6452775 (2002-09-01), Nakajima
patent: 6770852 (2004-08-01), Steger
patent: 6847014 (2005-01-01), Benjamin et al.
patent: 7161121 (2007-01-01), Steger
patent: 7274004 (2007-09-01), Benjamin et al.
patent: 7337745 (2008-03-01), Komino et al.
patent: 2003/0168439 (2003-09-01), Kanno et al.
patent: 2003/0198005 (2003-10-01), Sago et al.
patent: 2005/0173404 (2005-08-01), Benjamin et al.
patent: 2005/0211385 (2005-09-01), Benjamin et al.
patent: 2006/0144516 (2006-07-01), Ricci et al.
patent: 2007/0086144 (2007-04-01), Steger
patent: 2001-102436 (2001-04-01), None
patent: 2002-313901 (2002-10-01), None
patent: 2002359281 (2002-12-01), None
Official Action issued May 2, 2010 for Chinese Appln. No. 200580045528.X.
PCT International Search Report dated Oct. 18, 2006; PCT International Application PCT/US2005/047109.
Official Action dated Dec. 27, 2010 for Japanese Patent Appln. No. 2007-549558.
Notice of Preliminary Rejection issued Jan. 28, 2011 for Korean Appln. No. 2010-7005037.
Comendant Keith
Ricci Anthony J.
Tappan James
Buchanan & Ingersoll & Rooney PC
Lam Research Corporation
MacArthur Sylvia R.
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