Method of manufacturing an alternating phase shift mask

Details Method of manufacturing an alternating phase shift mask Method of manufacturing an alternating phase shift mask

2006-09-05

2006-09-05

Rosasco, S. (Department: 1756)

Fishing, trapping, and vermin destroying

Fishing

Fish landing devices combined with tackle, e.g., gaffs,...

C430S323000

Reexamination Certificate

active

07100322

ABSTRACT:
A method of manufacturing an alternating phase shift mask can be carried out in a short amount of time. A 180° phase shift region is formed using a multi-step etching process, and then a 0° phase region is formed. Forming the phase shift regions in this sequence minimizes the number of rounds of photolithography that have to be carried out in the method.

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