Method of manufacturing aluminum bonding pad with PSG coating

Details Method of manufacturing aluminum bonding pad with PSG coating Method of manufacturing aluminum bonding pad with PSG coating

1987-09-09

1989-04-25

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437203, 357 71, 357 52, H01L 21441

Patent

active

048248010

ABSTRACT:
A polysilicon film is provided in a first region provided with a bonding pad on a silicon substrate and a second region apart from the first region and surrounding the first region, an aluminum film serving as a bonding pad is provided on the polysilicon film in the first region, a PSG (Phospho-Silicate Glass) film is provided on the polysilicon film in the second region, and an insulating protective film including no phosphorus is provided between the aluminum film and the PSG film.

REFERENCES:
patent: 4091406 (1978-05-01), Lewis
patent: 4091407 (1978-05-01), Williams et al.
patent: 4097889 (1978-06-01), Kern et al.
patent: 4321612 (1982-03-01), Murata et al.
patent: 4396934 (1983-08-01), Nishida et al.
patent: 4472730 (1984-09-01), Ohta
patent: 4622576 (1986-11-01), Buyndski
patent: 4628590 (1986-12-01), Udo et al.

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