Method of manufacturing a trench transistor having a heavy...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257SE29262

Reexamination Certificate

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08044463

ABSTRACT:
A trenched field effect transistor is provided that includes (a) a semiconductor substrate, (b) a trench extending a predetermined depth into the semiconductor substrate, (c) a pair of doped source junctions, positioned on opposite sides of the trench, (d) a doped heavy body positioned adjacent each source junction on the opposite side of the source junction from the trench, the deepest portion of the heavy body extending less deeply into said semiconductor substrate than the predetermined depth of the trench, and (e) a doped well surrounding the heavy body beneath the heavy body.

REFERENCES:
patent: 4070690 (1978-01-01), Wickstrom
patent: 4132998 (1979-01-01), Dingwall
patent: 4145703 (1979-03-01), Blanchard et al.
patent: 4326332 (1982-04-01), Kenney
patent: 4329705 (1982-05-01), Baker
patent: 4333227 (1982-06-01), Horng et al.
patent: 4344081 (1982-08-01), Pao et al.
patent: 4345265 (1982-08-01), Blanchard
patent: 4392149 (1983-07-01), Horng et al.
patent: 4398339 (1983-08-01), Blanchard et al.
patent: 4485393 (1984-11-01), Kumamaru et al.
patent: 4503449 (1985-03-01), David et al.
patent: 4503598 (1985-03-01), Vora et al.
patent: 4541001 (1985-09-01), Schutten et al.
patent: 4639762 (1987-01-01), Neilson et al.
patent: 4682405 (1987-07-01), Blanchard et al.
patent: 4683643 (1987-08-01), Nakajima et al.
patent: 4767722 (1988-08-01), Blanchard
patent: 4808543 (1989-02-01), Parrillo et al.
patent: 4845537 (1989-07-01), Nishimura et al.
patent: 4860072 (1989-08-01), Zommer
patent: 4881105 (1989-11-01), Davari et al.
patent: 4893160 (1990-01-01), Blanchard
patent: 4914058 (1990-04-01), Blanchard
patent: 4967245 (1990-10-01), Cogan et al.
patent: 4974059 (1990-11-01), Kinzer
patent: 4983535 (1991-01-01), Blanchard
patent: 5016068 (1991-05-01), Mori
patent: 5017504 (1991-05-01), Nishimura et al.
patent: 5045900 (1991-09-01), Tamagawa
patent: 5072266 (1991-12-01), Bulucea et al.
patent: 5124764 (1992-06-01), Mori
patent: 5160491 (1992-11-01), Mori
patent: 5168331 (1992-12-01), Yilmaz
patent: 5233215 (1993-08-01), Baliga
patent: 5264716 (1993-11-01), Kenney
patent: 5298442 (1994-03-01), Bulucea et al.
patent: 5298780 (1994-03-01), Harada
patent: 5316959 (1994-05-01), Kwan et al.
patent: 5321289 (1994-06-01), Baba et al.
patent: 5341011 (1994-08-01), Hshieh et al.
patent: 5404040 (1995-04-01), Hshieh et al.
patent: 5405794 (1995-04-01), Kim
patent: 5410170 (1995-04-01), Bulucea et al.
patent: 5430324 (1995-07-01), Bencuya
patent: 5455190 (1995-10-01), Hsu
patent: 5460985 (1995-10-01), Tokura et al.
patent: 5468982 (1995-11-01), Hshieh et al.
patent: 5474943 (1995-12-01), Hshieh et al.
patent: 5508534 (1996-04-01), Nakamura et al.
patent: 5532179 (1996-07-01), Chang et al.
patent: 5541425 (1996-07-01), Nishihara
patent: 5558313 (1996-09-01), Hshieh et al.
patent: 5567634 (1996-10-01), Hébert et al.
patent: 5578851 (1996-11-01), Hshieh et al.
patent: 5592005 (1997-01-01), Floyd et al.
patent: 5597765 (1997-01-01), Yilmaz et al.
patent: 5602046 (1997-02-01), Calafut et al.
patent: 5605852 (1997-02-01), Bencuya
patent: 5614751 (1997-03-01), Yilmaz et al.
patent: 5629543 (1997-05-01), Hshieh et al.
patent: 5639676 (1997-06-01), Hshieh et al.
patent: 5648670 (1997-07-01), Blanchard
patent: 5656843 (1997-08-01), Goodyear et al.
patent: 5661322 (1997-08-01), Williams et al.
patent: 5665619 (1997-09-01), Kwan et al.
patent: 5665996 (1997-09-01), Williams et al.
patent: 5668026 (1997-09-01), Lin et al.
patent: 5674766 (1997-10-01), Darwish et al.
patent: 5679966 (1997-10-01), Baliga et al.
patent: 5688725 (1997-11-01), Darwish et al.
patent: 5689128 (1997-11-01), Hshieh et al.
patent: 5698459 (1997-12-01), Grubisich et al.
patent: 5701026 (1997-12-01), Fujishima et al.
patent: 5719422 (1998-02-01), Burr et al.
patent: 5729037 (1998-03-01), Hshieh et al.
patent: 5731611 (1998-03-01), Hshieh et al.
patent: 5747853 (1998-05-01), So et al.
patent: 5763914 (1998-06-01), Hshieh et al.
patent: 5763915 (1998-06-01), Hshieh et al.
patent: 5767550 (1998-06-01), Calafut et al.
patent: 5767567 (1998-06-01), Hu et al.
patent: 5776812 (1998-07-01), Takahashi et al.
patent: 5780324 (1998-07-01), Tokura et al.
patent: 5783491 (1998-07-01), Nakamura et al.
patent: 5783915 (1998-07-01), Shida et al.
patent: 5801408 (1998-09-01), Takahashi
patent: 5814858 (1998-09-01), Williams
patent: 5844277 (1998-12-01), Hshieh et al.
patent: 5864159 (1999-01-01), Takahashi
patent: 5869863 (1999-02-01), Wen
patent: 5877528 (1999-03-01), So
patent: 5877529 (1999-03-01), So et al.
patent: 5879971 (1999-03-01), Witek
patent: 5882966 (1999-03-01), Jang
patent: 5883410 (1999-03-01), So et al.
patent: 5883416 (1999-03-01), Lin et al.
patent: 5894150 (1999-04-01), Hshieh
patent: 5895951 (1999-04-01), So et al.
patent: 5895952 (1999-04-01), Darwish et al.
patent: 5907169 (1999-05-01), Hshieh et al.
patent: 5907776 (1999-05-01), Hshieh et al.
patent: 5923065 (1999-07-01), So et al.
patent: 5930063 (1999-07-01), Yoshihiro et al.
patent: 5930630 (1999-07-01), Hshieh et al.
patent: 5973361 (1999-10-01), Hshieh et al.
patent: 5986304 (1999-11-01), Hshieh et al.
patent: 5998266 (1999-12-01), So
patent: 5998836 (1999-12-01), Williams
patent: 5998837 (1999-12-01), Williams
patent: 6005271 (1999-12-01), Hshieh
patent: 6015737 (2000-01-01), Tokura et al.
patent: 6020827 (2000-02-01), Konrad et al.
patent: 6046078 (2000-04-01), So et al.
patent: 6049108 (2000-04-01), Williams et al.
patent: 6051468 (2000-04-01), Hshieh
patent: 6104060 (2000-08-01), Hshieh et al.
patent: 6121089 (2000-09-01), Zeng et al.
patent: 6165826 (2000-12-01), Chau et al.
patent: 6172398 (2001-01-01), Hshieh
patent: 6204533 (2001-03-01), Williams et al.
patent: 6221721 (2001-04-01), Takahashi
patent: 6258680 (2001-07-01), Fulford et al.
patent: 6281547 (2001-08-01), So et al.
patent: 6368920 (2002-04-01), Beasom
patent: 6404025 (2002-06-01), Hshieh et al.
patent: 6426260 (2002-07-01), Hshieh
patent: 6429481 (2002-08-01), Mo et al.
patent: 6521497 (2003-02-01), Mo et al.
patent: 6710406 (2004-03-01), Mo et al.
patent: 6828195 (2004-12-01), Mo et al.
patent: 6858514 (2005-02-01), Hsu et al.
patent: 2002/0185679 (2002-12-01), Baliga
patent: 2004/0140504 (2004-07-01), Hsu et al.
patent: 1090680 (1994-04-01), None
patent: 0 238 749 (1987-09-01), None
patent: 0 550 770 (1993-07-01), None
patent: 0 583 028 (1994-02-01), None
patent: 0 698 919 (1996-02-01), None
patent: 0 720 235 (1996-07-01), None
patent: 0 720 236 (1996-07-01), None
patent: 0 746 030 (1996-12-01), None
patent: 0 746 030 (1996-12-01), None
patent: 0 755 076 (1997-01-01), None
patent: 0 795 911 (1997-09-01), None
patent: 0 801 425 (1997-10-01), None
patent: 2269050 (1994-01-01), None
patent: 56131960 (1981-10-01), None
patent: 57018365 (1982-01-01), None
patent: 57153469 (1982-09-01), None
patent: 58137254 (1983-08-01), None
patent: 58210678 (1983-12-01), None
patent: 59080970 (1984-05-01), None
patent: 59193064 (1984-11-01), None
patent: 60028271 (1985-02-01), None
patent: 61102782 (1986-05-01), None
patent: 62012167 (1987-01-01), None
patent: 62016572 (1987-01-01), None
patent: 62023171 (1987-01-01), None
patent: 62046569 (1987-02-01), None
patent: 63114173 (1988-05-01), None
patent: 05226661 (1993-03-01), None
patent: 06-045612 (1994-02-01), None
patent: 07-66395 (1995-10-01), None
patent: 08-204194 (1996-08-01), None
patent: 08250731 (1996-09-01), None
patent: 08316479 (1996-11-01), None
patent: 09-036362 (1997-02-01), None
patent: 09102607 (1997-04-01), None
patent: 09-270512 (1997-10-01), None
patent: WO 93/03502 (1993-02-01), None
patent: WO 95/34094 (1995-12-01), None
patent: WO 97/07547 (1997-02-01), None
patent: WO 97/07547 (1997-02-01), None
patent: WO 97/16853 (1997-05-01), None
Blanchard, R.A., “Optimization of discrete high power MOS transistors,” Stanford Electronics Laboratory, Integrated Circuits Laboratory, Apr. 1982, Technical Report No. IDEZ696-2.
Chang, T.S. and Critchlow, D.L., “Verticle FET random-access memories with deep trench isolation,” IBM Technical Disclosure Bulletin, Jan. 1980, pp. 3683-3687, vol. 22(8B).
Goodenough, F., “Dense MOSFET enabl

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