Method of manufacturing a superconducting oxide pattern by laser

Details Method of manufacturing a superconducting oxide pattern by laser Method of manufacturing a superconducting oxide pattern by laser

1991-09-23

1993-09-28

King, Roy

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505730, 505731, 505732, 427 62, 427 63, 427596, 2191216, 21912185, 20419224, H01L 3912, B05D 512

Patent

active

052486583

ABSTRACT:
A superconducting ceramic film is deposited on a substrate by sputtering. In virtue of the low thermal conductivity of ceramic, a laser beam is irradiated to the ceramic film in order to remove the irradiated portion by sublimation and produce a pattern on the ceramic film.

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patent: 4900892 (1990-02-01), Baeuerle et al.
patent: 4957900 (1990-09-01), Yamazaki
patent: 4960751 (1990-10-01), Yamazaki
patent: 4980338 (1990-12-01), Yamazaki
patent: 5051396 (1991-09-01), Yamazaki
patent: 5079222 (1992-01-01), Yamazaki
patent: 5098884 (1992-05-01), Yamazaki

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