Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1988-04-25
1990-02-27
Andrews, Melvyn J.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156602, 15661641, 156DIG83, 422109, 422248, C30B 2102
Patent
active
049043366
ABSTRACT:
An apparatus for manufacturing a single crystal of compound semiconductor consisting of Ga and As comprises a crucible storing Ga and having a seed crystal arranged at a lower end portion thereof a gas material susceptor, arranged below the crucible, for storing As, the gas material susceptor and the crucible being arranged in a growth susceptor to be capable of communicating with each other, a main heater for heating and melting Ga in the crucible and for cooling the melt Ga from a lower portion thereof to grow a single crystal, a sub heater for heating and evaporating As in the gas material susceptor and allowing the evaporated As to react with the melt Ga in the said crucible, and a magnetic field applying coil for applying a vertical magnetic field in the melt Ga and As in the crucible so that a surface of the melt in the crucible which is grown to a single crystal is lower in temperature at a central portion thereof than a peripheral portion thereof in a radial direction and at the same time projects upward.
REFERENCES:
patent: 2890940 (1959-06-01), Pfann
patent: 4404172 (1983-09-01), Gault
patent: 4521272 (1985-06-01), Gault
patent: 4592895 (1986-06-01), Matsutani et al.
Journal of Crystal Growth 74 (1986) 491-506, North Holland, Amsterdam, "A Novel Application of the Vertical Gradient Freeze Method to the Growth of High Quality III-V Crystals"; Gault et al.
Journal of Crystal Growth 83 (1987) 174-183, North Holland, Amsterdam, "Vertical Gradient Freeze Growth of Large Diameter, Low Defect Density Indium Phosphide"; Monberg et al.
Kikuta Toshio
Ozawa Shoichi
Wagatsuma Katsumi
Andrews Melvyn J.
The Furukawa Electric Co. Ltd.
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