Method of manufacturing a semiconductor device having a pattern

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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156656, 156659, 204 32R, 204 38A, H01L 21441

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active

040352064

ABSTRACT:
A method of manufacturing a semiconductor device having a pattern of conductors, according to which method an auxiliary layer is formed which consists of two different sub-layers in which the negative of the desired pattern is provided and which is covered with a metal layer, in which the auxiliary layer and the said metal layer are then removed selectively.
The method is characterized in that the auxiliary layer comprises a lowermost layer of an anodically oxidizable metal and an uppermost layer of the oxide of the said metal and may be used in the manufacture of semiconductor devices, especially transistors for very high frequencies and integrated circuits.

REFERENCES:
patent: 3642548 (1972-02-01), Eger
patent: 3759798 (1973-09-01), Graff et al.
patent: 3778689 (1973-12-01), Bodway
patent: 3825453 (1974-07-01), Black et al.
patent: 3827949 (1974-08-01), Platter et al.

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