Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2005-08-23
2005-08-23
Alejandro-Mulero, Luz (Department: 1763)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S166000, C438S308000, C438S486000
Reexamination Certificate
active
06933182
ABSTRACT:
A method of manufacturing a semiconductor device, comprises the steps of: forming an amorphous silicon film on a substrate having an insulating surface; processing said amorphous silicon film by plasma of a gas that mainly contains hydrogen or helium; and giving an energy to said amorphous silicon film.
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Kusumoto Naoto
Ohnuma Hideto
Teramoto Satoshi
Yamazaki Shunpei
Alejandro-Mulero Luz
Fish & Richardson P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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