Method of manufacturing a semiconductor device and...

Details Method of manufacturing a semiconductor device and... Method of manufacturing a semiconductor device and...

2005-05-23

2009-08-04

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C257SE21561

Reexamination Certificate

active

07569440

ABSTRACT:
A method of manufacturing a semiconductor device, comprises the steps of: forming an amorphous silicon film on a substrate having an insulating surface; processing said amorphous silicon film by plasma of a gas that mainly contains hydrogen or helium; and giving an energy to said amorphous silicon film.

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