Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1984-07-19
1985-12-24
Bernstein, Hiram H.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
20412965, 427259, 156DIG64, 1566591, 156653, B05D 132
Patent
active
045606420
ABSTRACT:
A method of manufacturing a semiconductor device which comprises the step of applying a silicon carbide film having a prescribed perforated pattern as a masking film selectively to etch a silicon dioxide film or diffuse an impurity into a substrate.
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patent: 3465209 (1969-09-01), Denning et al.
patent: 3502517 (1970-03-01), Sussmann
patent: 3904454 (1975-09-01), Hagdo et al.
Bersin, Solid State Technology, 5/76, pp. 31-36.
Weaver, JBM Technical Disclosure Bulletin, vol. 17, No. 2, 7/74.
Ajima Takashi
Hiraki Shun-ichi
Koshino Yutaka
Oka Yoshitami
Yonezawa Toshio
Bernstein Hiram H.
Toyko Shibaura Electric Co., Ltd.
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