Method of manufacturing a rotation-magnetron-in-magnetron...

Details Method of manufacturing a rotation-magnetron-in-magnetron... Method of manufacturing a rotation-magnetron-in-magnetron...

2007-04-24

2007-04-24

Dinh, Trinh Vo (Department: 2821)

Electric lamp and discharge devices: systems

Combined load device or load device temperature modifying...

Distributed parameter resonator-type magnetron

C315S111410, C204S298200, C204S198001, C118S7230CB

Reexamination Certificate

active

11336880

ABSTRACT:
An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.

REFERENCES:
patent: 5282947 (1994-02-01), Brugge et al.
patent: 5770025 (1998-06-01), Kiyota
patent: 6236163 (2001-05-01), Maishev et al.
patent: 6432285 (2002-08-01), Kastanis et al.
patent: 6666957 (2003-12-01), Watanabe et al.
patent: 6692617 (2004-02-01), Fu et al.
patent: 2003/0116432 (2003-06-01), Schweitzer et al.
patent: 2003/0209431 (2003-11-01), Brown
patent: 2004/0035692 (2004-02-01), Ding et al.
patent: 2004/0094402 (2004-05-01), Gopalraja et al.
patent: 2004/0140204 (2004-07-01), Navala et al.
patent: 2006/0076232 (2006-04-01), Miller et al.
patent: 62-072121 (1987-04-01), None
patent: 2-34780 (1990-02-01), None
patent: 6-21041 (1994-01-01), None
patent: 8-253859 (1996-10-01), None
patent: 9-125241 (1997-05-01), None

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