Method of manufacturing a piezoelectric actuator array

Details Method of manufacturing a piezoelectric actuator array Method of manufacturing a piezoelectric actuator array

1994-05-04

1998-06-02

Hall, Carl E.

Metal working

Piezoelectric device making

310334, H01L 4122

Patent

active

057583960

ABSTRACT:
An array of M.times.N piezoelectric actuators is prepared by:

REFERENCES:
patent: 4398325 (1983-08-01), Piaget et al.
patent: 5359760 (1994-11-01), Busse et al.
patent: 5457863 (1995-10-01), Thomas, III et al.

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