Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-04-07
2010-11-16
Phan, Thiem (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S825000, C029S829000, C029S846000, C216S035000, C427S097200
Reexamination Certificate
active
07832098
ABSTRACT:
An opening is formed in resin20by a laser beam so that a via hole is formed. At this time, copper foil22, the thickness of which is reduced (to 3 μm) by performing etching to lower the thermal conductivity is used as a conformal mask. Therefore, an opening20acan be formed in the resin20if the number of irradiation of pulse-shape laser beam is reduced. Therefore, occurrence of undercut of the resin20which forms an interlayer insulating resin layer can be prevented. Thus, the reliability of the connection of the via holes can be improved.
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Asano Kouji
En Honjin
Hirose Naohiro
Ishida Naoto
Noda Kouta
IBIDEN Co., Ltd.
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Phan Thiem
LandOfFree
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