Method of manufacturing a light receiving module with optical fi

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

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1566471, H01L 2118, G03F 700

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active

054665582

ABSTRACT:
A light receiving module and its manufacturing method of an excellent structure which can make a good and uniform optical couple between an optical fiber and a light receiving element, and can improve its productivity. The light receiving module comprises a semiconductor substrate, a light receiving element mounted on a surface of the semiconductor substrate, a groove formed on a back surface of the semiconductor substrate, an inclined face in the back surface side facing the light receiving element, and an optical fiber fixed in the groove. A transmitted light signal through the fiber is reflected by the inclined face. The inclined face is formed at a distal end of the optical fiber, at the closed end wall of the groove, or a side wall of a dimple arranged on the extension line of the groove. The reflected light is admitted to a light receiving face of the light receiving element, from the back surface side of the semiconductor substrate.

REFERENCES:
patent: 4130343 (1978-12-01), Miller et al.
patent: 4294510 (1981-10-01), Chappell
patent: 5017263 (1991-05-01), Clark
patent: 5071213 (1991-12-01), Chan

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