Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2005-12-20
2010-02-16
Pham, Thanhha (Department: 2813)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C438S055000, C438S107000, C257SE21499
Reexamination Certificate
active
07662653
ABSTRACT:
A method of manufacturing a hermetically-sealed chamber with an electrical feedthrough includes the step of hermetically fixing an electrode to a substrate in a predetermined location on the substrate. A passage is formed through the substrate through the predetermined location such that at least a portion of the electrode is exposed to the passage. The passage is then at least partially filled with an electrically conductive material. A housing is then formed including the substrate such that the housing defines a chamber, with the electrode being disposed within the housing and the chamber being hermetically sealed. The electrode within the chamber can be placed in electrical communication with an exterior electrical component by way of the electrically conductive material in the passage.
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patent
Allen Mark
Cros Florent
Fonseca Michael
O'Brien David
Park Jin Woo
CardioMEMS, Inc.
Kilpatrick & Stockton LLP
Pham Thanhha
LandOfFree
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